Emission theory of amorphous-material sputtering. Energy dependence of the sputtering coefficient
Crossref DOI link: https://doi.org/10.1134/S1027451017050342
Published Online: 2017-10-04
Published Print: 2017-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pustovit, A. N.
License valid from 2017-09-01