Profile, morphology and surface elemental composition of through micro-holes in silicon wafers
Crossref DOI link: https://doi.org/10.1134/S1027451017050391
Published Online: 2017-10-04
Published Print: 2017-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhukov, A. A.
Zabotin, Yu. M.
Podgorodetsky, S. G.
Anurov, A. E.
License valid from 2017-09-01