Document is current

Any future updates will be listed below

Mechanism of the Interaction between F Atoms and SiCF3 Groups on the Low-κ Dielectric Surface

Crossref DOI link: https://doi.org/10.1134/S1027451018030370

Published Online: 2018-06-18

Published Print: 2018-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

About CrossMark