Composition and Structure of a Nanofilm Multilayer System of the SiO2/Si/CoSi2/Si(111) Type Obtained via Ion Implantation
Crossref DOI link: https://doi.org/10.1134/S1027451018040298
Published Online: 2018-08-06
Published Print: 2018-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ergashov, Y. S.
Umirzakov, B. E.
Text and Data Mining valid from 2018-07-01
Article History
Received: 12 October 2017
First Online: 6 August 2018