Emission Theory of Amorphous Material Sputtering: the Dependence of the Sputtering Coefficient on the Angle of Primary Ion Beam Incidence
Crossref DOI link: https://doi.org/10.1134/S1027451018050142
Published Online: 2018-10-09
Published Print: 2018-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pustovit, A. N.
Text and Data Mining valid from 2018-09-01
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Article History
Received: 11 December 2017
First Online: 9 October 2018