Maskless X-Ray Lithography Based on Microoptical Electromechanical Systems and Microfocus X-Ray Tubes
Crossref DOI link: https://doi.org/10.1134/S1027451018050324
Published Online: 2018-10-09
Published Print: 2018-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Salashchenko, N. N.
Chkhalo, N. I.
Dyuzhev, N. A.
Text and Data Mining valid from 2018-09-01
Article History
Received: 18 January 2018
First Online: 9 October 2018