Sputtering of Silicon Single Crystals under Irradiation with a Helium and Argon Ion Beam with an Average Energy of 1 keV
Crossref DOI link: https://doi.org/10.1134/S1027451019020204
Published Online: 2019-05-22
Published Print: 2019-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Volkov, N. V.
Safonov, D. A.
Text and Data Mining valid from 2019-03-01
Version of Record valid from 2019-03-01
Article History
Received: 21 June 2018
Revised: 15 September 2018
Accepted: 15 September 2018
First Online: 22 May 2019