Development of a Gas Cluster Ion Source and Its Application for Surface Treatment
Crossref DOI link: https://doi.org/10.1134/S1027451019020356
Published Online: 2019-05-22
Published Print: 2019-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pelenovich, V. O.
Zeng, X. M.
Ieshkin, A. E.
Chernysh, V. S.
Tolstogouzov, A. B.
Yang, B.
Fu, D. J.
Text and Data Mining valid from 2019-03-01
Version of Record valid from 2019-03-01
Article History
Received: 9 June 2018
Revised: 10 July 2018
Accepted: 20 July 2018
First Online: 22 May 2019