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Mechanical Properties of Thin AlSiN Films, Studied by Nanoindentation, as a Thermal-Stability Criterion

Published Online: 2019-06-25

Published Print: 2019-05

Authors

Kuznetsova, T. A.

Zubar, T. I.

Lapitskaya, V. A.

Sudzilovskaya, K. A.

Chizhik, S. A.

Uglov, V. V.

Shymanski, V. I.

Kvasov, N. T.
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Text and Data Mining valid from 2019-05-01

Version of Record valid from 2019-05-01
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Article History

Received: 14 June 2018

Revised: 28 June 2018

Accepted: 28 June 2018

First Online: 25 June 2019

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