Optimization of the Electron Optical System of a Scanning Electron Microscope for Measuring the Size of Micro- and Nanoobjects
Crossref DOI link: https://doi.org/10.1134/S1027451019040074
Published Online: 2019-08-28
Published Print: 2019-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kazmiruk, V. V.
Kurganov, I. G.
Podkopaev, A. A.
Savitskaya, T. N.
Text and Data Mining valid from 2019-07-01
Version of Record valid from 2019-07-01
Article History
Received: 16 November 2018
Revised: 26 December 2018
Accepted: 12 January 2019
First Online: 28 August 2019