Formation of SEM Images in the Secondary Electron Mode. 2. Structures with a Trapezoidal Profile and Small Side-Wall Inclinations
Crossref DOI link: https://doi.org/10.1134/S1027451019050100
Published Online: 2019-10-21
Published Print: 2019-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Novikov, Yu. A.
Text and Data Mining valid from 2019-09-01
Version of Record valid from 2019-09-01
Article History
Received: 14 January 2019
Revised: 20 February 2019
Accepted: 23 February 2019
First Online: 21 October 2019