Determination of the Thickness of Thin Films Based on Scanning Electron Microscopy and Energy Dispersive X-Ray Analysis
Crossref DOI link: https://doi.org/10.1134/S1027451019050136
Published Online: 2019-10-21
Published Print: 2019-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sokolov, S. A.
Milovanov, R. A.
Sidorov, L. N.
Text and Data Mining valid from 2019-09-01
Version of Record valid from 2019-09-01
Article History
Received: 16 December 2018
Revised: 17 January 2019
Accepted: 20 January 2019
First Online: 21 October 2019