Application of Ion-Beam Treatment in the Process of the Magnetron Deposition of Thin SnO2 Films
Crossref DOI link: https://doi.org/10.1134/S1027451019060053
Published Online: 2019-12-23
Published Print: 2019-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Alalykin, A. S.
Krylov, P. N.
Zakirova, R. M.
Fedotova, I. V.
Kostenkov, N. V.
Durman, E. A.
Text and Data Mining valid from 2019-11-01
Version of Record valid from 2019-11-01
Article History
Received: 11 December 2018
Revised: 22 February 2019
Accepted: 12 March 2019
First Online: 23 December 2019