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Method for Manufacturing Silicon X-Ray Masks Via Plasma Chemical Etching

Published Online: 2020-08-25

Published Print: 2020-07

Authors

Gentselev, A. N.

Dultsev, F. N.

Goldenberg, B. G.

Kuper, K. E.
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Text and Data Mining valid from 2020-07-01

Version of Record valid from 2020-07-01
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Article History

Received: 29 December 2019

Revised: 29 January 2020

Accepted: 31 January 2020

First Online: 25 August 2020

Document is current