Determination of the Beam-Focus Plane in a SEM by the Dependence of the Signal Contrast on the Potential of a Focusing Electrode
Crossref DOI link: https://doi.org/10.1134/S1027451020050080
Published Online: 2020-10-19
Published Print: 2020-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kazmiruk, V. V.
Kurganov, I. G.
Podkopaev, A. A.
Savitskaya, T. N.
Text and Data Mining valid from 2020-09-01
Version of Record valid from 2020-09-01
Article History
Received: 14 January 2020
Revised: 20 February 2020
Accepted: 25 February 2020
First Online: 19 October 2020