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High-Sensitivity Temperature Sensor on the Basis of Single-Crystal Si(111) Implanted from Multiple Directions with P+ and B+ Ions

Published Online: 2020-12-28

Published Print: 2020-11

Authors

Rysbaev, A. S.

Normurodov, M. T.

Rakhimov, A. M.

Tursunmetova, Z. A.

Tashatov, A. K.
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Text and Data Mining valid from 2020-11-01

Version of Record valid from 2020-11-01
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Article History

Received: 11 January 2020

Revised: 4 February 2020

Accepted: 7 February 2020

First Online: 28 December 2020

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