Effect of Ion Implantation on the Adhesion of Positive Diazoquinone-Novolak Photoresist Films to Single-Crystal Silicon
Crossref DOI link: https://doi.org/10.1134/S1027451020060476
Published Online: 2020-12-28
Published Print: 2020-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Vabishchevich, S. A.
Brinkevich, S. D.
Prosolovich, V. S.
Vabishchevich, N. V.
Brinkevich, D. I.
Text and Data Mining valid from 2020-11-01
Version of Record valid from 2020-11-01
Article History
Received: 24 December 2019
Revised: 20 January 2020
Accepted: 25 January 2020
First Online: 28 December 2020