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Effect of Ion Implantation on the Adhesion of Positive Diazoquinone-Novolak Photoresist Films to Single-Crystal Silicon

Published Online: 2020-12-28

Published Print: 2020-11

Authors

Vabishchevich, S. A.

Brinkevich, S. D.

Prosolovich, V. S.

Vabishchevich, N. V.

Brinkevich, D. I.
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Text and Data Mining valid from 2020-11-01

Version of Record valid from 2020-11-01
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Article History

Received: 24 December 2019

Revised: 20 January 2020

Accepted: 25 January 2020

First Online: 28 December 2020

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