Nanolayers of Tantalum- and Aluminum Oxides and Dielectric Compositions Based on Them
Crossref DOI link: https://doi.org/10.1134/S1027451021010225
Published Online: 2021-04-21
Published Print: 2021-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ezhovskii, Yu. K.
Text and Data Mining valid from 2021-03-01
Version of Record valid from 2021-03-01
Article History
Received: 4 April 2020
Revised: 9 June 2020
Accepted: 11 June 2020
First Online: 21 April 2021