Transport of Secondary Ions—Products of the Inelastic Interaction of Protons with Integrated-Circuit Materials
Crossref DOI link: https://doi.org/10.1134/S1027451021020117
Published Online: 2021-04-21
Published Print: 2021-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Novikov, N. V.
Chechenin, N. G.
Shirokova, A. A.
Text and Data Mining valid from 2021-03-01
Version of Record valid from 2021-03-01
Article History
Received: 4 June 2020
Revised: 27 August 2020
Accepted: 30 August 2020
First Online: 21 April 2021