A Modernized Bosch Etching Process for the Formation of Tapered Structures on a Silicon Surface
Crossref DOI link: https://doi.org/10.1134/S1027451021030162
Published Online: 2021-06-25
Published Print: 2021-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Rudy, A. S.
Morozov, O. V.
Kurbatov, S. V.
Text and Data Mining valid from 2021-05-01
Version of Record valid from 2021-05-01
Article History
Received: 10 August 2020
Revised: 25 November 2020
Accepted: 28 November 2020
First Online: 25 June 2021