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Structure and Properties of CrAlSiC Films Deposited by the Vacuum-Plasma Technique under Various Conditions

Published Online: 2021-10-19

Published Print: 2021-09

Authors

Rubshtein, A. P.

Vladimirov, A. B.

Plotnikov, S. A.

Volkova, E. G.
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Text and Data Mining valid from 2021-09-01

Version of Record valid from 2021-09-01
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Article History

Received: 12 January 2021

Revised: 25 February 2021

Accepted: 28 February 2021

First Online: 19 October 2021

Document is current