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Investigation of the Effect of Irradiation by a Low-Energy Electron Beam on the Capacitance–Voltage Characteristics of SiO2

Crossref DOI link: https://doi.org/10.1134/S1027451021050323

Published Online: 2021-10-19

Published Print: 2021-09

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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