Energy and Transport Lengths for Describing Volume of Resist Modification in Ion-Beam Lithography
Crossref DOI link: https://doi.org/10.1134/S1027451022040310
Published Online: 2022-08-03
Published Print: 2022-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Shabelnikova, Ya. L.
Zaitsev, S. I.
Text and Data Mining valid from 2022-08-01
Version of Record valid from 2022-08-01
Article History
Received: 26 December 2021
Revised: 22 February 2022
Accepted: 28 February 2022
First Online: 3 August 2022
CONFLICT OF INTEREST
: We declare that we have no conflicts of interest.