Crossmark

Test Objects with a Rectangular Profile for SEM. 4. Amplitude Measurements on a SEM

Published Online: 2022-10-07

Published Print: 2022-10

Authors

Novikov, Yu. A.
License Information

Text and Data Mining valid from 2022-10-01

Version of Record valid from 2022-10-01
More Information

Article History

Received: 20 December 2021

Revised: 22 March 2022

Accepted: 22 March 2022

First Online: 7 October 2022

CONFLICT OF INTEREST

: The author declares that he has no conflicts of interest.

Document is current