Regularities of the Formation of SiO2 Nanophases and Nanofilms on a Si Surface during $${\text{O}}_{2}^{ + }$$-Ion Implantation
Crossref DOI link: https://doi.org/10.1134/S1027451022060039
Published Online: 2022-12-12
Published Print: 2022-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Allayarova, G. Kh.
Text and Data Mining valid from 2022-12-01
Version of Record valid from 2022-12-01
Article History
Received: 7 February 2022
Revised: 11 March 2022
Accepted: 11 March 2022
First Online: 12 December 2022
CONFLICT OF INTEREST
: I declare that I have no conflicts of interest.