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Simulation of the Deposition of Thin-Film Materials Used in the Manufacturing of Devices with Miniaturized Circuits

Published Online: 2022-12-12

Published Print: 2022-12

Authors

Abdelkader Bouazza,
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Text and Data Mining valid from 2022-12-01

Version of Record valid from 2022-12-01
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Article History

Received: 31 March 2022

Revised: 28 May 2022

Accepted: 28 May 2022

First Online: 12 December 2022

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

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