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Peculiarities of Interaction of Low-Energy Noble Gas Atoms with Methyl Groups on the Low-κ Surface

Published Online: 2023-05-10

Published Print: 2023-02

Authors

Solovykh, A. A.

Sycheva, A. A.

Voronina, E. N.
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Text and Data Mining valid from 2023-02-01

Version of Record valid from 2023-02-01
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Article History

Received: 20 June 2022

Revised: 15 July 2022

Accepted: 15 July 2022

First Online: 10 May 2023

CONFLICT OF INTEREST

: We declare that we have no conflicts of interest.

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