Magnetron Deposition of Oxide Films in the Metallic Mode Enhanced by Radio-Frequency Inductively Coupled Plasma Source
Crossref DOI link: https://doi.org/10.1134/S1027451023050166
Published Online: 2023-10-18
Published Print: 2023-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sidelev, D. V.
Voronina, E. D.
Text and Data Mining valid from 2023-10-01
Version of Record valid from 2023-10-01
Article History
Received: 25 February 2023
Revised: 17 April 2023
Accepted: 17 April 2023
First Online: 18 October 2023
CONFLICTS OF INTEREST
: The authors declare no conflicts of interest.