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Numerical Simulation of Thermal Processes and the Effect of Heating of Near-Surface Layers of Titanium on the Diffusion Transfer of Dopants during High-Intensity Pulsed Ion Implantation

Crossref DOI link: https://doi.org/10.1134/S1027451023060289

Published Online: 2023-12-08

Published Print: 2023-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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