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Silicon Echelles for Soft X-Ray and Extreme UV Radiation: Influence of the Camber of the Reflective Facet on the Diffraction Efficiency

Published Online: 2024-03-04

Published Print: 2023-12

Authors

Goray, L. I.

Berezovskaya, T. N.

Mokhov, D. V.

Sharov, V. A.

Shubina, K. Yu.

Pirogov, E. V.

Dashkov, A. S.
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Text and Data Mining valid from 2023-12-01

Version of Record valid from 2023-12-01
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Article History

Received: 27 January 2023

Revised: 16 March 2023

Accepted: 16 March 2023

First Online: 4 March 2024

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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