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On the Deposition of an FexNi1 – x Film by the Magnetron Sputtering of a Multilayer Target

Published Online: 2024-03-04

Published Print: 2023-12

Authors

Shapovalov, V. I.

Ivantsov, M. O.

Krainov, N. S.
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Text and Data Mining valid from 2023-12-01

Version of Record valid from 2023-12-01
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Article History

Received: 10 January 2023

Revised: 15 March 2023

Accepted: 15 March 2023

First Online: 4 March 2024

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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