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Morphology, Structure, and Gas-Sensitive Properties of Manganese-Containing Silicon–Carbon Films

Published Online: 2024-05-02

Published Print: 2024-02

Authors

Mikhailova, T. S.

But, A. A.

Kalusulingam, R.

Myasoedova, T. N.
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Text and Data Mining valid from 2024-02-01

Version of Record valid from 2024-02-01
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Article History

Received: 23 May 2023

Revised: 25 July 2023

Accepted: 25 July 2023

First Online: 2 May 2024

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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