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Tungsten Sputtering Yields by Light Impurities of Plasma

Published Online: 2024-05-07

Published Print: 2024-04

Authors

Mikhailov, V. S.

Babenko, P. Yu.

Zinoviev, A. N.
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Text and Data Mining valid from 2024-04-01

Version of Record valid from 2024-04-01
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Article History

Received: 10 August 2023

Revised: 25 October 2023

Accepted: 25 October 2023

First Online: 7 May 2024

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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