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Determination of the Ion–Solid Interaction Potential from Experiment and Its Effect on the Profiles of Implanted Particles

Published Online: 2024-07-15

Published Print: 2024-06

Authors

Zinoviev, A. N.

Babenko, P. Yu.

Mikhailov, V. S.

Tensin, D. S.
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Text and Data Mining valid from 2024-06-01

Version of Record valid from 2024-06-01
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Article History

Received: 28 December 2023

Revised: 19 February 2024

Accepted: 19 February 2024

First Online: 15 July 2024

CONFLICT OF INTEREST

: The author of this work declares that he has no conflicts of interest.

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