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The Effect of Atmospheric Oxide Thermodesorption on Negative-Ion Atomic and Cluster Sputtering of Silicon Single Crystal by Cesium Ions

Published Online: 2024-09-26

Published Print: 2024-08

Authors

Atabaev, B. G.

Djabbarganov, R.

Khalmatov, A. S.

Rakhmatov, A. Z.

Kamardin, A. I.
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Text and Data Mining valid from 2024-08-01

Version of Record valid from 2024-08-01
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Article History

Received: 26 July 2023

Revised: 29 September 2023

Accepted: 29 September 2023

First Online: 26 September 2024

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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