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Formation of Ultrasmooth Highly Orientated ZnO Films on Amorphous Surface (SiO2/Si) by Magnetron Sputtering

Published Online: 2024-12-18

Published Print: 2024-10

Authors

Ismailov, A. M.

Guidalaeva, T. A.

Muslimov, A. E.

Grigoriev, Yu. V.

Kanevsky, V. M.
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Text and Data Mining valid from 2024-10-01

Version of Record valid from 2024-10-01
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Article History

Received: 14 April 2024

Revised: 20 June 2024

Accepted: 20 June 2024

First Online: 18 December 2024

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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