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Study of Silicon Dioxide Sputtering by a Focused Gallium Ion Beam

Published Online: 2024-12-18

Published Print: 2024-10

Authors

Podorozhniy, O. V.

Rumyantsev, A. V.

Volkov, R. L.

Borgardt, N. I.
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Text and Data Mining valid from 2024-10-01

Version of Record valid from 2024-10-01
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Article History

Received: 19 February 2024

Revised: 28 March 2024

Accepted: 28 March 2024

First Online: 18 December 2024

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest

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