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Oxidation and Etching of Thin Ruthenium Films in Low Ion Energy Oxygen Plasma

Published Online: 2025-03-01

Published Print: 2024-12

Authors

Amirov, I. I.

Alov, N. V.

Sharanov, P. Yu.

Rakhimova, T. V.
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Text and Data Mining valid from 2024-12-01

Version of Record valid from 2024-12-01
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Article History

Received: 10 April 2024

Revised: 12 June 2024

Accepted: 12 June 2024

First Online: 1 March 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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