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Effect of the Angle of Incidence of Low-Energy Ar+ Ion Beams on the Composition and Structure of the GaAs Surface

Published Online: 2025-03-01

Published Print: 2024-12

Authors

Tashmukhamedova, D. A.

Umirzakov, B. E.

Tursunmetova, Z. A.
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Text and Data Mining valid from 2024-12-01

Version of Record valid from 2024-12-01
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Article History

Received: 17 June 2024

Revised: 30 August 2024

Accepted: 30 August 2024

First Online: 1 March 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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