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Features of Magnetron Deposition by Sputtering Boron Target in Reactive Gases Medium

Published Online: 2025-03-17

Published Print: 2024-12

Authors

Yushkov, G. Yu. https://orcid.org/0000-0002-7615-6058
Gridilev, V. D. https://orcid.org/0009-0008-0866-5548
Nikolaev, A. G. https://orcid.org/0000-0003-2724-3697
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Text and Data Mining valid from 2024-12-01

Version of Record valid from 2024-12-01
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Article History

Received: 29 September 2023

Revised: 11 November 2024

Accepted: 11 November 2024

First Online: 17 March 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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