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The Influence of Heat Treatments on the Temperature Dependence of Dislocation Luminescence in Ion-Implanted Silicon

Published Online: 2025-03-17

Published Print: 2024-12

Authors

Tereshchenko, A. N.

Zotov, A. A.

Korolev, D. S.

Nikolskaya, A. A.

Mikhaylov, A. N.

Belov, A. I.

Tetelbaum, D. I.
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Text and Data Mining valid from 2024-12-01

Version of Record valid from 2024-12-01
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Article History

Received: 21 June 2024

Revised: 5 August 2024

Accepted: 5 August 2024

First Online: 17 March 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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