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Mechanisms of Methyl Group Elimination from Low-K Dielectric Surfaces by Plasma of Various Composition

Published Online: 2025-06-25

Published Print: 2025-02

Authors

Sycheva, A. A.

Solovykh, A. A.

Voronina, E. N.
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Text and Data Mining valid from 2025-02-01

Version of Record valid from 2025-02-01
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Article History

Received: 25 July 2024

Revised: 22 September 2024

Accepted: 22 September 2024

First Online: 25 June 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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