Crossmark

Cluster Ion Treatment of the Surface of Single-Crystal Silicon and Germanium at an Angle of 60°

Published Online: 2025-06-25

Published Print: 2025-02

Authors

Nikolaev, I. V.

Korobeishchikov, N. G.

Lapega, A. V.
License Information

Text and Data Mining valid from 2025-02-01

Version of Record valid from 2025-02-01
More Information

Article History

Received: 27 July 2024

Revised: 12 September 2024

Accepted: 12 September 2024

First Online: 25 June 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

Document is current