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Study of Silicon Amorphization by Xenon Ions Using Transmission Electron Microscopy and Monte Carlo Simulation

Published Online: 2025-09-10

Published Print: 2025-04

Authors

Podorozhniy, O. V.

Rumyantsev, A. V.

Borgardt, N. I.

Minnebaev, D. K.

Ieshkin, A. E.
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Text and Data Mining valid from 2025-04-01

Version of Record valid from 2025-04-01
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Article History

Received: 27 June 2024

Revised: 22 August 2024

Accepted: 22 August 2024

First Online: 10 September 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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