Crossmark

Control of the Plate Movement in Extreme Ultraviolet Scanners Based on Optimal Performance Algorithms

Published Online: 2025-09-25

Published Print: 2025-06

Authors

Petrakov, E. V.

Balandin, D. V.
License Information

Text and Data Mining valid from 2025-06-01

Version of Record valid from 2025-06-01
More Information

Article History

Received: 3 December 2024

Revised: 6 January 2025

Accepted: 6 January 2025

First Online: 25 September 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

Document is current