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Numerical Modeling of Diffusion Processes in Silicon under Repetitively Pulsed Energy Impact on the Surface of a High-Power Density Titanium Ion Beam

Published Online: 2026-04-02

Published Print: 2025-12

Authors

Ivanova, A. I.

Bleykher, G. A.

Zaytsev, D. D.

Korneva, O. S.
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Text and Data Mining valid from 2025-12-01

Version of Record valid from 2025-12-01
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Article History

Received: 17 April 2025

Revised: 25 May 2025

Accepted: 25 May 2025

First Online: 2 April 2026

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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