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DC Magnetron Deposition with Pure Boron Target in Reactive Gases Atmospheres

Published Online: 2026-04-02

Published Print: 2025-12

Authors

Gridilev, V. D.

Yushkov, G. Yu.
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Text and Data Mining valid from 2025-12-01

Version of Record valid from 2025-12-01
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Article History

Received: 18 October 2025

Revised: 15 November 2025

Accepted: 15 November 2025

First Online: 2 April 2026

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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