Determination of impurity elements in high-purity solid precursors based on tantalum pentoxide by inductively coupled plasma mass spectrometry
Crossref DOI link: https://doi.org/10.1134/S1061934814060069
Published Online: 2014-05-23
Published Print: 2014-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Elizarova, I. R.
Masloboeva, S. M.
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