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Thermodynamic Simulation of the Composition of the Major Background Ions in Low-Temperature (“Cold”) Inductively Coupled Plasma

Published Online: 2024-08-24

Published Print: 2024-08

Authors

Pupyshev, A. A.

Zaitceva, P. V.

Burylin, M. Yu.

Maltsev, M. A.

Morozov, I. V.

Osina, E. L.
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Text and Data Mining valid from 2024-08-01

Version of Record valid from 2024-08-01
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Article History

Received: 5 September 2023

Revised: 2 October 2023

Accepted: 2 October 2023

First Online: 24 August 2024

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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