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The Energy Flux to the Substrate in the High-Power Impulse Magnetron Sputtering of Copper Films

Crossref DOI link: https://doi.org/10.1134/S1062873823704695

Published Online: 2024-02-06

Published Print: 2023-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Oskirko, V. O. https://orcid.org/0000-0001-5167-0133
Zakharov, A. N. https://orcid.org/0000-0002-1068-6160
Grenadyorov, A. S. https://orcid.org/0000-0001-6013-0200
Semenov, V. A. https://orcid.org/0000-0001-5089-7096
Solovyev, A. A. https://orcid.org/0000-0001-7775-9769
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Text and Data Mining valid from 2023-12-01

Version of Record valid from 2023-12-01
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Article History

Received: 2 October 2023

Revised: 9 October 2023

Accepted: 18 October 2023

First Online: 6 February 2024

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.